Skip to main content
Caplight Logo









EUV Tech

EUV Tech

Private
Martinez, CaliforniaFrontier & Industrial Techhttps://www.euvtech.com/

Last Round

VC Round

Oct 1, 2025

Total Funding Raised

$805,318

Momentum

Top 50%

of companies Caplight tracks

Company Overview

EUV Tech is a semiconductor equipment company that develops and manufactures at-wavelength extreme ultraviolet (EUV) metrology tools for advanced semiconductor manufacturing.

Sector

Frontier & Industrial Tech

Verticals

Semiconductors, Computing Hardware, Quality Management

Business Model

B2B

Customer Profile

Hardware Sales, Services & Consulting

AI Layer

Non-AI

Keywords

EUV lithographysemiconductor metrologyEUV mask inspectionwafer fab equipmentEUV pellicle inspectionsemiconductor inspectionEUV reflectometersemiconductor capital equipmentfab toolsthin film measurementEUV sourcesemiconductor yield managementadvanced lithographymetrology hardwaresemiconductor R&D

Historical Pricing

Historical view of private secondary pricing and transaction trends.

Unlock Pricing Charts

Sign up to view complete historical pricing and secondary transactions.

Caplight Momentum Score

Proprietary index based on bid/ask volume and sentiment.

View Momentum History

Track how buyer interest and sentiment changes over time.

EUV Tech Comparables

Compare EUV Tech with similar companies based on industry and business-model similarity.

EUV Tech comparables — related companies by embedding similarity
CompanySimilarityMarket Cap
Lasertec Corporation
81%
D I Corp
78%
Applied Materials
77%

EUV Tech Funding Rounds

Historical fundraising activity

Data table
RoundDateAmount RaisedValuationInvestorsSources
VC RoundOct 1, 2025
GrantJul 1, 2023
Series AMar 1, 2023
DebtApr 1, 2020

Key People

Founding team and executive leadership

Patrick Naulleau

CEO

Executive Team

Chami Perera

COO, Vice President, Operations

Executive Team

EUV Tech Investors

Notable investors and investment history

EUV Tech investors
InvestorRounds
City National BankDebt
Intel CapitalSeries A
In-Q-TelVC Round

Market signals

Structured signals derived from secondary market and firmographic data.

  • Oct 1, 2025

    In-Q-Tel participated in the VC Round.

  • Jun 1, 2025

    Monthly visitors increased 37% MoM, reaching 5.2K.

EUV Tech Filings

Explore SEC and related filing metadata, where available.

EUV Tech filings preview — column headings only; records require access
TypeDateAmount OfferedAmount SoldFilingPagesDownload

Filing documents are not displayed on this public page. Request access to learn about available coverage.

Request access

Firmographic Details

HeadquartersMartinez, California
Employee Range103
Year Founded1997
Last FundingOct 1, 2025

Institutional Data Access

Join leading institutional investors using Caplight to access private market data, discover pricing, and execute secondary block trades.

Requires verified institutional or accredited status.

See something wrong or outdated?